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Siam equipment

High energy ion beams

High energy ion beams

ALTAÏS tandetron linear accelerator

Altais
  • Beam line for ion implantation
  • Vacuum & non vacuum beam line for atomic and nuclear spectroscopies
  • Vacuum & non vacuum beam line for radiobiology
  • UHV and very low noise beam lines for surface and interface analysis
  • Non-destructive quantitative characterization
  • Composition and thickness of thin films (a few microns)
  • Adaptable geometry measurement
  • Polymers and biological samples analysis
  • Sample size: maximum 20 mm in diameter

Radiobiology station

PIXE, PIGE, RBS, BS, NRA, RNDA, ERDA, ToF-ERD

Low energy ion beams

TOF-SIMS
Tof-sims
  • Beam line for ion implantation
  • ToF-SIMS spectrometre (TOFSIMS IV, IONTOF)
  • Molecular surface spectroscopy
  • Semi quantitative (with standards)
  • Very sensitive
  • Chemical mapping
  • Profiling (deepness)

Electronic spectroscopies

XPS/UPS Escalab 250XiXPS K-AlphaHREELS Spectrometers

XPS

  • Quantitative chemical and surface spectroscopy (< 10 nm)
  • Chemical mapping (3 μm lateral resolution)
  • Profiling (deepness)
  • Ar+ ions
  • Ar+ clusters sources (organic materials profiling)


UPS

  • UV photoemission spectroscopy – valence balance
XPS-K Alpha
  • Electronic energy loss (H detection)
  • ISS: ion scattering spectroscopy (He+)

Vacuum deposition chambers

Irradiation stationPlasma sputteringPECVD deposition

Large and uniform beam (~ 0.5cm²)

 

4 chambers for plasma sputtering

(DC, RF and AC)

4 chambers for PECVD

deposition and functionalisation

  • Adherent living cells
  • Living micro-organisms
  • Irradiation possible with protons,
  • α and carbon ions (o.1 to 10 Gy/min)
Film deposition
  • Ta,Fe,Cr,Au
  • TiO2, VO2, TiN
  • AZOY
  • MgXZnYAlZ
  • Au, Cu, Co nanoparticles
  • Piled SiO2/TiO2 multilayers
  • DLC
  • ZnO, polymers


Technology

  • sputtering
  • inductive & capacitative
  • DC, MF, FR excitation

Other related equipment

  • Mass spectrometre (Hiden)
  • Atomic emission spectroscopy (Princeton)
  • Langmuir probe
  • Surface profilometer (Dektak)
  • Nanoparticule size measuring (CPS disk)
  • Mössbauer spectroscopy
  • STM UHV
  • UV-vis-NIR
  • FTIR
  • SVET
  • Scanning Kelvin probe
  • Ellipsometry
  • contact angle
  • vacuum transfer suitcases
  • MEB (FEG-MEB, EDX, STEM)